silizium

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ANSYS(TM) FEM: #multiphysics #simulation of #MEMS-sensors based on #silicon with #piezoelectric thin-film layers and etched #quartz crystals

Papers, Publications & oral presentations

MEMS patent

BMFT-Verbundprojekt: Einsatz der Mikromechanik zur Herstellung Frequenzanaloger Sensoren, HSG-IMIT, Villingen-Schwenningen

sensor research-project sensors sensoren silicon mems quarz bizerba bosch-sensor piezoelectric-sensors microsystems silizium fasens bmft motometer hsg-imit mikrotechnik

Mikromechanik, MEMS, Mikrosystemtechnik, MST, Halbleiter, Semiconductor, microsystems

electronics mst sensors chips actuator cleanroom silicon mems electronics-engineering micromechanics microtech reinraum mems-sensors microsystems silizium mikromechanik halbleiter mikrosystem

ANSYS analyses of triple-beam silicon sensors, Silizium-Dreifachstimmgabel, Si(100)

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