diff --git a/cmake/cinn/external/jitify.cmake b/cmake/cinn/external/jitify.cmake
index 4a9fef619270f..cb49f4261dfb1 100644
--- a/cmake/cinn/external/jitify.cmake
+++ b/cmake/cinn/external/jitify.cmake
@@ -5,22 +5,41 @@ endif()
 
 include(ExternalProject)
 
-set(JITIFY_SOURCE_PATH ${THIRD_PARTY_PATH}/install/jitify)
+# clone jitify to Paddle/third_party
+set(JITIFY_SOURCE_DIR ${PADDLE_SOURCE_DIR}/third_party/jitify)
+set(JITIFY_URL https://github.com/NVIDIA/jitify.git)
+set(JITIFY_TAG 57de649139c866eb83acacfe50c92ad7c6278776)
+
+if(NOT EXISTS ${JITIFY_SOURCE_DIR})
+  execute_process(COMMAND ${GIT_EXECUTABLE} clone ${JITIFY_URL}
+                          ${JITIFY_SOURCE_DIR})
+  execute_process(COMMAND ${GIT_EXECUTABLE} -C ${JITIFY_SOURCE_DIR} checkout -q
+                          ${JITIFY_TAG})
+else()
+  # check git tag
+  execute_process(
+    COMMAND ${GIT_EXECUTABLE} -C ${JITIFY_SOURCE_DIR} describe --tags
+    OUTPUT_VARIABLE CURRENT_TAG
+    OUTPUT_STRIP_TRAILING_WHITESPACE)
+  if(NOT ${CURRENT_TAG} STREQUAL ${JITIFY_TAG})
+    message(STATUS "Checkout JITIFY to ${JITIFY_TAG}")
+    execute_process(COMMAND ${GIT_EXECUTABLE} -C ${JITIFY_SOURCE_DIR} checkout
+                            -q ${JITIFY_TAG})
+  endif()
+endif()
 
 ExternalProject_Add(
   external_jitify
   ${EXTERNAL_PROJECT_LOG_ARGS}
-  GIT_REPOSITORY "https://github.com/NVIDIA/jitify.git"
-  GIT_TAG 57de649139c866eb83acacfe50c92ad7c6278776
+  SOURCE_DIR ${JITIFY_SOURCE_DIR}
   PREFIX ${THIRD_PARTY_PATH}/jitify
-  SOURCE_DIR ${JITIFY_SOURCE_PATH}
   CONFIGURE_COMMAND ""
   PATCH_COMMAND ""
   BUILD_COMMAND ""
   UPDATE_COMMAND ""
   INSTALL_COMMAND "")
 
-include_directories(${JITIFY_SOURCE_PATH})
+include_directories(${JITIFY_SOURCE_DIR})
 
 add_library(extern_jitify INTERFACE)
 add_dependencies(extern_jitify external_jitify)